Hi,
As far as know, the OfficeFileCache is a temporary location used to sync your local cache with SharePoint when documents are updated from your client, or when you open the documents from the browser. If you sync files to the local folder from OneDrive for Business, it will also sync to the Local OfficeFileCache folder.
Thus, if you have backup the files, you can delete them.
For more detail information, please refer to the following links:
https://community.office365.com/en-us/f/154/t/248984
https://community.office365.com/en-us/f/148/t/257657
George ZhaoTechNet Community Support
As I said above, if you have backup the files, I think we do not need to backup this fold officefilecache folder, and we can delete it.
Regards,
George ZhaoTechNet Community Support